巻号一覧
33 巻, 7 号
選択された号の論文の12件中1～12を表示しています
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沓名 宗春2005 年 33 巻 7 号 p. 426-427
発行日: 2005/07/15
公開日: 2014/03/26
ジャーナル フリーPDF形式でダウンロード (214K) -
久住 庸輔2005 年 33 巻 7 号 p. 428-432
発行日: 2005/07/15
公開日: 2014/03/26
ジャーナル フリーLaser mask repair system is a machine to repair defects of photomasks by laser zapping and laser CVD (Chemical Vapor Deposition). Laser zapping and laser CVD are briefly explained. Our laser mask repair systems LM700A, LM710A and LM500A/B are explained. LM700A/LM710A has been developed to repair defects of reticles used for 130/100 nm node semiconductor devices and LM500A/B has been designed for large scale photomasks used for the LCD manufacturing.抄録全体を表示PDF形式でダウンロード (13984K) -
吉新 喜市, 松本 貞行, 高林 正和, 島倉 泰久, 杉原 隆嗣2005 年 33 巻 7 号 p. 433-438
発行日: 2005/07/15
公開日: 2014/03/26
ジャーナル フリーWe have developed a tunable dispersion compensator with chirped fiber gratings which can compensate polarization mode dispersion (PMD) and chromatic dispersion (CD) simultaneously. The key part of this device is composed of twin chirped fiber Bragg gratings and temperature control by divided thin film heaters. The chirped fiber Bragg gratings were fabricated by UV laser irradiation.抄録全体を表示PDF形式でダウンロード (3632K) -
中村 秀生, 寺田 真樹2005 年 33 巻 7 号 p. 439-443
発行日: 2005/07/15
公開日: 2014/03/26
ジャーナル フリーSince the mid-1980s, Toyota Motor Corporation has applied CO2 lasers and YAG lasers to machine (welding, piercing, cutting, surface modifying etc.) automobile parts. In recent years diode lasers, which are excellent in terms of cost performance, are now available on the market as a new type of oscillator and are expected to bring about a new age in laser technology. Two current problems with these lasers, however, are the lack of sufficient output and the difficulty in improving the focusing the beam, which is why it has not been easy to apply them to the machining of metal parts in the past. On the other hand, plastics can be joined with low energy because they have a lower melting point than that of metal and the rate of absorption of the laser is easy to control. Moreover, because the high degree of freedom in molding plastic parts results in many complex shapes that need to be welded, Toyota is looking into the use of diode lasers to weld plastic parts. This article will introduce the problems of plastics welding and the methods to solve them referring to actual examples.抄録全体を表示PDF形式でダウンロード (11012K) -
高出力パルスレーザーの遠隔伝送技術向井 成彦, 佐野 雄二, 依田 正樹, 千田 格, 上原 拓也, 山本 哲夫2005 年 33 巻 7 号 p. 444-451
発行日: 2005/07/15
公開日: 2014/03/26
ジャーナル フリーLaser peening is a process that introduces residual compressive stress on a metal surface by irradiating laser pulses underwater without any surface preparations. The process utilizes the impulsive effect of high-pressure plasma generated by ablative interaction of each laser pulse with material. A laser peening system, which delivers laser pulses with mirrors or through an optical fiber, was developed and has been applied to preventive maintenance against stress corrosion cracking (SCC) in nuclear power reactors since 1999. The system is composed of laser oscillators, a beam delivery system, a laser irradiation head, remote handling equipment and a monitor/control system. Beam delivery with mirrors was accomplished through alignment/tracking functions with sufficient accuracy. Reliable fiber-delivery was attained by the development of a novel input coupling optics and irradiation heads with automated focusing. The remote delivery of intense laser pulses opens up the possibility of new applications of laser technology.抄録全体を表示PDF形式でダウンロード (4949K) -
藤田 雅之, 吉門 章, 堀邊 英夫2005 年 33 巻 7 号 p. 452-456
発行日: 2005/07/15
公開日: 2014/03/26
ジャーナル フリーWe have developed a new laser application called laser-assisted resist removal. Laser irradiation far below the ablation threshold can be used to remove a photoresist strongly adhered to a base material (metal or plastic). We employed the second harmonics of Q-switched Nd: YAG laser pulses to irradiate the sample. At an appropriate laser fluence, the photoresist, which transmits the laser light, was detached from the substrate while maintaining its original shape. The technique is not based on laser ablation and therefore no damage is caused to the substrate. Furthermore, it is a dry process that uses neither water nor chemicals, thus preventing the environmental pollution the conventional chemical process produces. Moreover, this method can reduce power consumption and running costs.抄録全体を表示PDF形式でダウンロード (1366K) -
松野 明, 楡 孝, 芝原 健太郎2005 年 33 巻 7 号 p. 457-461
発行日: 2005/07/15
公開日: 2014/03/26
ジャーナル フリーUsing KrF excimer laser annealing with various laser pulse durations, we were able to form an ultra-shallow junction. Evaluating junction depth, sheet resistance, and crystal defects, we observed that in the case of long pulse durations, the number of crystal defects decreased. The combination of the junction depth and sheet resistance of the junction satisfied the request for a 90-nm node for ULSI. Furthermore, a MOSFET was fabricated by laser annealing with a heat assist. The heat assist is effective for reducing the required laser energy, crystal defects in the junction, and reducing laser damage to the electrode. We employed a simple onedimensional thermal diffusion model to estimate the solidification velocity during laser irradiation, with results indicating that longer pulse duration slowed the solidification velocity. Therefore, the behavior of the solidification velocity can explain the reduction of crystal defects.抄録全体を表示PDF形式でダウンロード (1017K) -
豊田 雅宏2005 年 33 巻 7 号 p. 462-468
発行日: 2005/07/15
公開日: 2014/03/26
ジャーナル フリーThe variance in intensity of a laser beam propagating through a turbulent medium increases with the off-axis beam angle. Measurements of this dependence for an uplink qualitatively agreed with theory. The intensity variance with on-axis transmission, derived from the off-axis beam angle dependence of the intensity fluctuation in multiple laser beam transmission with a separated aperture (multi-beam), was lower than that with parallel transmission. Examination of the effect of multi-beam transmission considering the beam pointing error showed that the mean intensity with two-beam uplink transmission was about six times that with singlebeam transmission at a specified intensity variance.抄録全体を表示PDF形式でダウンロード (1109K) -
黒田 孝春, 渡部 武弘, 松坂 壮太2005 年 33 巻 7 号 p. 469-474
発行日: 2005/07/15
公開日: 2014/03/26
ジャーナル フリーMicromachining of silicon was investigated using the fourth-harmonic wavelength (λ=266 nm,τ=6ns) of a pulsed Nd: YAG laser beam. The beam was irradiated onto a silicon workpiece under flowing water. The drilled surfaces were then characterized using an optical microscope, laser interference microscope and a scanning electron microscope. Compared with atmospheric machining, problems, such as debris and reattachment of molten material, were improved clearly and dramatically. Machining under water produced a somewhat smoother ablated surface because the molten silicon was rapidly solidified. When the focal point was set over the surface, the ablated shapes after laser irradiation were irregular because water evaporation caused unstable ablation. On the other hand, stable ablation was produced when the focal point was set under the surface. The relationship between the irradiation parameters and the resulting shape became quantitatively clear from the experiment.抄録全体を表示PDF形式でダウンロード (7138K) -
今崎 一夫, 李 大治2005 年 33 巻 7 号 p. 475-480
発行日: 2005/07/15
公開日: 2014/03/26
ジャーナル フリーA new approach of laser-driven acceleration with Bessel beam is described. Bessel beam, in contrast to the Gaussian beam, shows “diffraction-free” characteristics in its propagation, which implies potential in laserdriven acceleration. But a normal laser, even if the Bessel beam, laser can not accelerate charged particle efficiently because the difference of velocity between the particle and photon makes cyclic acceleration and deceleration phase. We proposed a Bessel beam truncated by a set of annular slits those makes several special regions in its travelling path, where the laser field becomes very weak and the accelerated particles are possible to receive no deceleration as they undergo decelerating phase. Thus, multistage acceleration is realizable with high gradiant. In a numerical computation, we have shown the potential of multistage acceleration based on a three-stage model.抄録全体を表示PDF形式でダウンロード (1888K) -
高瀬 仁, 中山 斌義, 平田 勇騎, 徐 永錫, 藤本 靖, 中塚 正大2005 年 33 巻 7 号 p. 481-483
発行日: 2005/07/15
公開日: 2014/03/26
ジャーナル フリーWe measured the optical gain properties of Bi-doped silica glass at 1.3μm with 0.8-μm excitation, and demonstrated the maximum gain coefficient of 0.80 cm -1, with 0.77-W excitation. Since there was low loss at 1.3μm in the sample, the gain was a net gain. These results indicate that Bi-doped silica glass can work as a core material of optical fiber amplifiers at 1.3μm, the zero-dispersion wavelength.抄録全体を表示PDF形式でダウンロード (391K) -
光量子情報処理の実現に向けて武岡 正裕, 佐々木 雅英2005 年 33 巻 7 号 p. 484-490
発行日: 2005/07/15
公開日: 2014/03/26
ジャーナル フリーPDF形式でダウンロード (1410K)
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