抄録
We have characterized CO2 laser generated debris from plane tin (Sn) targets with gold coated quartz crystal microbalances (QCM). Sputtering was the dominant process for 1mm and 15μm thick solid Sn targets. In addition, average conversion efficiency at 13.5nm of 2.0% within 2% full bandwidth and 2π sr solid angle was obtained. This indicates that a high CE without Sn debris deposition on a multi-layer collector mirror can be obtained.
