フェムト秒レーザー加工の現状と将来動向

抄録

Current status of commercialized one-box type femtosecond lasers for material processing is summarized, showing a wide variety of available pulse energy and repetition rate. Depending on the irradiated fluence, the femtosecond laser pulses give us distinctive phenomena such as ablation, LIPSS (Laser-Induced Periodic Surface Structure), phase transition of the semiconductor. In a viewpoint of industrial applications, lower manufacturing cost is generally expected for lower process fluence. Higher manufacturing speed is expected for higher average power with high repetition rate, about 100μJ pulse energy, and multiple beam output.