波長変換を用いた高出力可視・紫外光源の現状と動向

抄録

All solid-state high power visible and ultraviolet laser oscillators are expected to use in various industrial applications such as fine material processing, annealing process of amorphous-silicon, and so on. We have developed two types of visible and UV laser oscillators with wave length conversion technique. One is high power type (Nd: YAG) and the other is high repetition rate type (Nd: YVO₄). Maximum THG output power of high power type has reached 125W with 6.4% pumping efficiency at 10kHz, that is the highest power output using the intra cavity THG technique currently known in the world. Maximum single mode THG output power of the high repetition rate type has reached 6W at 50k Hz. The life time of THG crystal is expected over 400 hours at one position of THG crystal and total life time of that is expected over one year.