レーザー研究
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
スペックル干渉法と三角測量法を用いた複合距離計測
松田 文夫岡島 拓杉浦 純平長南 功男北川 秀夫西脇 彰
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2008 年 36 巻 9 号 p. 579-583

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Two methods of displacement measurement of object with diffusing surface have been developed already.One is by speckle pattern interferometry method with wavelength order accuracy and a half wavelength measurement area, and another is by triangle method with micrometer order accuracy and a millimeter measurement range. We propose a method of complex displacement measurement by using the speckle pattern interferometry method and the triangle method. In both methods, measurement point on object surface is the same.In this paper, a calculation method used in the method of complex displacement measurement is described.The method make that displacement measurement of object with diffusing surface can be available with wavelength order accuracy and a millimeter measurement area.
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