Abstract
A ruthenium-coated cylindrical mirror was investigated to collect and focus the energy flux of 5- to
17-nm wavelength soft X-rays that are generated in a laser-produced xenon plasma. We found the
mirror’s optimum position where the energy of transmitted and focused X-rays through the mirror was
maximum, and determined the irradiation position where the spot diameter was minimum. The
maximum intensity of the collected soft X-rays was 11 ± 1.5 J/m2 at the center of 1-mm in diameter
focus spot. The energy density was improved by about 24 times compared with that without the mirror.
These results suggest that a compact soft X-ray processing system can realized using laser plasma soft
X-rays.
