抄録
Recently two-photon microfabrication techniques have attracted much attention due to their ability to
produce complex three-dimensional micro/nanostructures and a wide variety of materials. In this paper,
we briefly review the recent progress of two-photon microfabrication and introduced nanofabrication
techniques using both femtosecond and deactivation laser beams. Such post processes as electroless
plating and thermal treatment are also demonstrated to produce functional micro/nano devices. Finally
promising applications including photonics, lab-on-a-chip, and MEMS are introduced.
