抄録
We report an analytic model based on one-dimensional cantilever structure for designing the athermal
and tunable MEMS VCSEL. The theoretical results calculated by using the model show good agreement
with experimental results. We also discuss the theoretical limit of the wavelength tuning range with
athermal operation. It is revealed that the limiting factor of the tuning range is the free-spectral-range of
the cavity, which can be expanded by making the cavity length shorter.
