抄録
We are summarizing the development states of CLBO nonlinear crystal, picosecond laser light source,
and laser processing system for the development of high quality laser processing using 266 nm
picosecond laser. In addition, we will introduce the development direction of the NEDO project. With
the development of high quality, long life CLBO crystal and the development of picosecond laser using
gain switched semiconductor laser as seed laser, it became possible to develop a practical high power
266 nm picosecond laser. In the NEDO project, we are aiming to develop a high quality laser processing
system that can be introduced into actual production. Toward this goal, we will develop a high power
266 nm picosecond laser with an average output of 50 W combined with high speed and high precision
beam delivery system.
