抄録
2D and 3D metal microstructures were directly written using the femtosecond laser reductive sintering
of metal oxide nanoparticles. We coated CuO nanoparticle solutions, including CuO nanoparticles, a
reductant agent, and a dispersant, on glass substrates. Then the focused femtosecond laser pulses were
irradiated onto the solution film to write the microstructures in air. Finally, the non-irradiated CuO
nanoparticles were removed. Cu-rich and Cu2O-rich microstructures were selectively fabricated by
controlling the laser irradiation conditions. We applied this process to the fabrication of 2D Cu/Cu2O
microtemperature sensors and 3D Cu-rich micro flow sensors. We believe this process is useful for
fabricating various sensors on arbitral shaped substrates in air.
