レーザー研究
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
レーザー解説
フェムト秒レーザープロセシングの最近の進展
杉岡 幸次
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ジャーナル フリー

2022 年 50 巻 3 号 p. 117-

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Distinct characteristics of femtosecond lasers such as ultrashort pulse width and extremely high peak intensity have opened up new avenues for materials processing. Thus, many researchers are currently studying in diverse fields of materials processing using femtosecond lasers, including micromachining, surface nanostructuring, super-resolution nanofabrication, nano and novel materials synthesis, material welding and bonding, three-dimensional and volume processing, and tailored beam processing. Among these subjects, this paper reviews recent progress of three topics on surface nanostructuring, 3D and volume processing, and tailored beam processing that are being investigated by the author’s group.
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