抄録
There are intense research activities in developing high-power short-wavelength light sources and their
application to various fields. This paper describes the overview of the special issue on “recent advances
in high-power short-wavelength light sources and their application technology.” The topic of the issue
covers the development of deep ultraviolet (DUV) laser diodes, generation of DUV, vacuum ultraviolet
(VUV), and extreme ultraviolet (EUV) light by high-order harmonic generation and wave-mixing, and
their application, such as laser processing, photoemission spectroscopy, EUV mask inspection, and virus
inactivation.
https://ror.org/0391a8v61 
