Abstract
Micro lens arrays were processed in glass plates by the irradiation of carbon dioxide (CO2) laser. In order to process many lenses in one glass plate, a lens was made by using a focusing beam of CO2 laser. Based on those experimental evidences, micro lens arrays have been formed with 3×3 lenses of the maximum refractive index difference of 0.001, the lens radius of 300 μm and the 2 mm intervals.