The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Semiconductor Laser Embedded with Highly Resistive Layers
The Embedding Growth of Highly Resistive Epitaxial Layers by MOVPE
Shigenobu YAMAKOSHIKenya NAKAI
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1988 Volume 16 Issue 11 Pages 750-757

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Abstract
The epitaxial growth and the selective growth technologies of Fe doped highly resistive InP layers by MOVPE are discussed. As an application, a planner-embedded InGaAsP/InP heterostructure laser with a semi-insulating InP current-blocking layer is demonstrated.
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© The Laser Society of Japan
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