レーザー研究
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
小型SR光源の開発とSR利用研究
高田 博史
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ジャーナル フリー

1991 年 19 巻 11 号 p. 1038-1047

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Present status of the development and applications of the compact SR rings in Sumitomo Electric Industries Ltd. is summarized. We have been developing the compact SR rings, called NIJI series, dedicated to several applications such as x-ray lithography and photon-induced CVD processes. NIJI-II is a normal conducting ring with straight sections for insertion devices: An Onuki-type polarizing undulator is installed in one of the straight sections at present. NIJI-III, which is the superconducting ring, can provide a wide-exposure area of 50×50 mm2 by using a beam-wobbling method. The compact SR rings are useful for the research on SR applications because of their simple operation.
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