抄録
Using a 100 Hz TEA CO2 laser with a gas recycler, we have made the experimental investigation of laser gas degradation over a wide range of operating conditions. It was verified that both the decrease in the laser power and the onset of arcing were closely related to the O2 concentration. A simple and practical model was also developed to describe the O2 production and accumulation by discharge in the laser gas. By providing a large-scale gas recycler based on the O2 analysis, long-term operation was successfully attained with an average power of 500 W at a repetition rate of 100 Hz.
