The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Deposition by Velocity Selection of Laser Ablated Particles
Tadashi SUGIHARAKanji KUBA
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1995 Volume 23 Issue 5 Pages 364-367

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Abstract
An apparatus with a rotating mechanical chopper for thin film production has been developed. It is demonstrated that the energy of ablated particles is well selected by this method. Further, this method is applicable to Au thin film deposition and, is recognized to be useful to improve thin film quality because the number of droplets in the film are drastically decreased.
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© The Laser Society of Japan
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