Gold CO₂ Laser Mirror and its Protective Layer Deposited with Ion Beam Assistance

抄録

Ion-beam-assisted deposition (IAD) gold film and its protective layers used as laser mirrors and reflectors for near IR and IR have been discussed. In order to have high reflectance the gold film is deposited without heating or ion beam assistance. To avoid the mirror from degradation by moisture and having better abrasion resistance, HfO₂ film was deposited with ion beam assistance as a protective layer. Depend on the application, different glue layer between a substrate and gold film is necessary. The reflectance of a laser mirror can be increased by coating some pairs of enhanced dielectric layers on the top of the gold film.