Abstract
A micro-magnetic divice consisting of patterned Sr-ferrite by excimer laser ablation is described. By using a projection-patterned etching, the etched pattern of 80μm in depth is achieved in focused laser irradiation (600mJ/cm2, 10Hz, 45 minutes) in air. The magnetic properties for aspect ratio and profile of laser etched grooves are calculated by a three dimensional magnetic field analysis. Furthermore, the magnetic flux density onto the Sr-ferrite substrate is also measured by magneto-optical sensor.
