多層膜軟x線ミラー小史II
90年代における多層膜軟X線ミラーの発展状況と将来の動向
1997 年 25 巻 5 号 p. 348-354
詳細
1997 年 25 巻 5 号 p. 348-354
The history of multilayer mirrors for soft x-ray optics from the late 1980's to the present is briefly reviewed. This introduces the history of fabrication techniques, improvement of multilayer performance, applications and x-ray optical devices, adding these introduces future trends and future plans of several researchers.
