抄録
The Biochemical IC using new three dimensional micro fabrication technique has been developed by the author's group. The concept of the Biochemical IC proposed by Ikuta in 1993 is completely different from the silicon based micro-TAS (Total Analysis Systems). The biochemical IC is based on modular concept like a today's IC/LSI family. Each biochemical IC chip in disk (or cell) shape contains various kind of functional component such as multiple micro valves, micro chemical condensers (concentrators) and micro reactors. Another uniqueness of this research is using new 3D micro fabrication process to make a hybrid structure suitable for real three dimensional integrated micro fluidic devices. Author's original IH process (micro stereo lithography) was up-graded to make composite structures consisting of UV polymer and other materials. Finally, total system made of various biochemical IC chips were constructed and controlled for many applications.
