Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Analysis of Silicide/Silicon Interfacial Stractures Using Medium-Energy Ion Scattering
Shigeaki Zaima
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Keywords: medium-energy ion scattering, Silicide, interface, structure analysis, monolayer analysis
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1995 Volume 34 Issue 7 Pages 878-882

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