MATERIALS TRANSACTIONS
Online ISSN : 1347-5320
Print ISSN : 1345-9678
ISSN-L : 1345-9678
Chemical Vapor Deposition of Iridium, Platinum, Rhodium and Palladium
J. R. Vargas GarciaTakashi Goto
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2003 Volume 44 Issue 9 Pages 1717-1728

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Abstract

This article reviews the progress in the chemical vapor deposition of iridium, platinum, rhodium and palladium metals. In the course of the last decade the number of articles on CVD of this group of metals has increased significantly. A wide variety of metal organic complexes have been investigated as potential precursors and appreciable results have been obtained. However, some aspects such as low deposition rates and impurity incorporation into the films still remain as concerns in this area. The representative results on CVD of these metals are presented according to the type of metal organic complexes used.

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© 2003 The Japan Institute of Metals and Materials
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