Optimization of Thickness Uniformity in Electrodeposition onto a Patterned Substrate

Abstract

A numerical simulation based on the finite element method was used to obtain the optimal electrodeposition condition at a patterned cathode. The calculated deposition rates agreed well with the measured ones. Influences of the following parameters on uniformity of electrodeposit have been studied; width of auxiliary electrode, gap between cathode and auxiliary electrode, distance between the inner wall of bath and auxiliary electrode, shape of auxiliary electrode, paddle velocity, gap between cathodes and paddles, anode size.