MATERIALS TRANSACTIONS
Online ISSN : 1347-5320
Print ISSN : 1345-9678
ISSN-L : 1345-9678
Change in Mechanical Properties of Ion-Irradiated Ceramics Studied by Nanoindentation
Shinsuke NakanoShunsuke MutoTetsuo Tanabe
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2006 Volume 47 Issue 1 Pages 112-121

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Abstract

Changes in hardness of several representative ceramics and semiconductors associated with ion irradiation were systematically studied using a combination of nanoindentation and finite element analysis. We established a new method for obtaining the precise hardness of the embedded damaged layer of ion-irradiated samples. The method was applied to silicon carbide, α-quartz, silica glass and silicon, which enabled us to semi-quantitatively discuss changes in their mechanical properties with irradiation-induced structural changes on the basis of experimentally obtained material parameters. Finally, we propose a new atomistic mechanism for plastic deformation of covalent amorphous materials. The present results will provide a standard framework for discussing mechanical property changes in ceramics with energetic particle irradiation.

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© 2006 The Japan Institute of Metals and Materials
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