Abstract
Changes in hardness of several representative ceramics and semiconductors associated with ion irradiation were systematically studied using a combination of nanoindentation and finite element analysis. We established a new method for obtaining the precise hardness of the embedded damaged layer of ion-irradiated samples. The method was applied to silicon carbide, α-quartz, silica glass and silicon, which enabled us to semi-quantitatively discuss changes in their mechanical properties with irradiation-induced structural changes on the basis of experimentally obtained material parameters. Finally, we propose a new atomistic mechanism for plastic deformation of covalent amorphous materials. The present results will provide a standard framework for discussing mechanical property changes in ceramics with energetic particle irradiation.
