Abstract
Single-layer Pd membrane with the thickness of about 2.5 μm was successfully prepared by microfabrication technology. Hydrogen permeation of the as-prepared Pd membrane was investigated in the temperature range of 473–673 K under hydrogen transmembrane pressure of ∼40 kPa. Hydrogen permeation of Pd membrane with the thickness of 0.70 mm was also carried out for comparisons. It was found that the hydrogen permeability of the 2.5 μm-thick Pd membrane was about half of that of the 0.7 mm-thick Pd membrane. Surface resistance was less significant in hydrogen permeation through the thin microfabricated Pd membrane than thin Pd membranes supported by porous materials. Grain growth was observed in the thin microfabricated Pd membrane upon hydrogen permeation.
