Abstract
Low-energy characteristic X-ray emission is detected during bombardment of positive low energy ions onto insulator materials. The phenomenon is considered to be related to surface charge-up. To study further the mechanism, the characteristic X-rays was studied during 30 keV Ga+ ions bombardment onto Al2O3 monocrystalline specimens applied with a direct current (DC) bias in the present work. The applied DC voltage builds an electric field parallel to the surface of the specimen. The results show that the characteristic X-rays of O-Kα and Al-Kα increased with the increasing of the applied DC voltages.
