Preparation Conditions of CaTiO₃ Film by Metal-Organic Chemical Vapor Deposition

Abstract

Calcium titanate (CaTiO₃) films were prepared by metal-organic chemical vapor deposition (MOCVD) using Ca(dpm)₂ and Ti(O-i-Pr)₂(dpm)₂ precursors. The phases, composition and morphology of Ca-Ti-O system films changed depending on molar ratio of Ca to Ti (R_Ca/Ti), total pressure (P_tot) and substrate temperature (T_sub). CaTiO₃ films in a single phase were obtained at the condition of R_Ca/Ti=0.95, T_sub=1073 K and P_tot=0.8 kPa, and R_Ca/Ti=0.78, T_sub=973 K and P_tot=0.8 kPa. The CaTiO₃ films prepared at T_sub=1073 K had a well-developed columnar texture, and significant (010) orientation was observed at R_Ca/Ti from 0.59 to 0.72. The deposition rate showed the highest value of 1.25×10⁻⁸ m s⁻¹ at T_sub=1073 K, P_tot=0.4 kPa and R_Ca/Ti=0.95.