Online ISSN : 1347-5320
Print ISSN : 1345-9678
ISSN-L : 1345-9678
Properties of Strontium Copper Oxide Films Prepared by Radio Frequency Reactive Magnetron Sputtering with Different Oxygen Partial Pressures
Jui-wen LiuShih-chin LeeChih-hao Yang
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2007 Volume 48 Issue 10 Pages 2743-2746


Transparent conductive strontium copper oxide (SCO) films were grown on glass substrates by radio frequency magnetron sputtering technique at room temperature with different oxygen partial pressures. Structural, electrical and optical properties of these films were studied. Grazing incidence angle x-ray diffraction (GIAXRD) analysis showed that SrCu2O2 structure was achieved when oxygen partial pressure was raised above 2.0×10−1 Pa. Both carrier density and resistivity of the film varied with oxygen partial pressure. The carrier density and resistivity of the film prepared with 4.0×10−1 Pa of oxygen pressure were 2.89×1021 cm−3 and 6.64×10−2 Ω·cm, respectively. The carrier mobility was 0.092 cm2 V−1 s−1 and the Hall coefficient measured at room temperature indicated that the conduction is p-type. The optical transmittance in the visible range at 550 nm was 29%∼41%.

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© 2007 The Japan Institute of Metals and Materials
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