Properties of Strontium Copper Oxide Films Prepared by Radio Frequency Reactive Magnetron Sputtering with Different Oxygen Partial Pressures

Abstract

Transparent conductive strontium copper oxide (SCO) films were grown on glass substrates by radio frequency magnetron sputtering technique at room temperature with different oxygen partial pressures. Structural, electrical and optical properties of these films were studied. Grazing incidence angle x-ray diffraction (GIAXRD) analysis showed that SrCu₂O₂ structure was achieved when oxygen partial pressure was raised above 2.0×10⁻¹ Pa. Both carrier density and resistivity of the film varied with oxygen partial pressure. The carrier density and resistivity of the film prepared with 4.0×10⁻¹ Pa of oxygen pressure were 2.89×10²¹ cm⁻³ and 6.64×10⁻² Ω·cm, respectively. The carrier mobility was 0.092 cm² V⁻¹ s⁻¹ and the Hall coefficient measured at room temperature indicated that the conduction is p-type. The optical transmittance in the visible range at 550 nm was 29%∼41%.