2007 Volume 48 Issue 2 Pages 227-233
Epitaxial SrRuO3 (SRO) thin films were prepared on SrTiO3 (STO) single-crystal substrates by laser ablation, and their microstructures and anisotropy of electrical conductivity were investigated. (001), (110) and (111) oriented SRO thin films were grown epitaxially on (001), (110) and (111) STO substrates at oxygen pressure of 13 Pa and substrate temperature of 973 K, respectively. Epitaxial (001) and (111) SRO thin films showed flat and smooth surface with a terrace and step structure whereas (110) SRO thin film had a faceted island-like structure. The in-plain orientation relationships of [100] SRO || [100] STO in (001) SRO/(001) STO thin films, [001] SRO || [001] STO in (110) SRO/(110) STO thin films and [112] SRO || [112] STO in (111) SRO/(111) STO thin films were identified. Epitaxial (001) SRO thin films exhibited the highest electrical conductivity of 2.4×105 S·m−1 among the (001), (110) and (111) SRO thin films.
