MATERIALS TRANSACTIONS
Online ISSN : 1347-5320
Print ISSN : 1345-9678
ISSN-L : 1345-9678
Microstructure and Elasticity of Glassy Alloy Surface by Reactive and Inert Ion Implantation
Shinji MuraishiHirono NaitoTatuhiko Aizawa
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2007 Volume 48 Issue 7 Pages 1859-1863

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Abstract

Present work focuses on the structural change of Zr-Cu glassy film via penetration of different reactivity of N+ and Ar+ and its elasticity measurement. Amorphous Zr-30 at%Cu film has been synthesized by ion beam sputtering on Si substrate. Nitrogen implantation induced precipitation microstructure with (Zr-Cu) nitride and Cu phase in glassy matrix. Inert gas element of Ar+ makes voids structure inside of the film at the mean penetration depth of Ar+ as maintained glassy phase. Resultant microstructures due to penetrated ions strongly depend on their degree of chemical reactivity with constituents. Surface elasticity of modified structure have been evaluated from nano-indentation test and given the normalization treatment for measured Young’s modulus.

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© 2007 The Japan Institute of Metals and Materials
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