Preparation and Photocatalytic Property of TiO₂ Columnar Nanostructure Films

Abstract

The rutile TiO₂ films with columnar nanostructure were prepared by combining the glancing angle deposition (GLAD) technique in magnetron sputtering system with the subsequent two-step annealing treatment. Experimental results showed that all the TiO₂ films kept discrete columnar structures as the Ti films deposited by GLAD and accomplished the phase transition from Ti to rutile TiO₂. Such TiO₂ films performed photocatalytic activity effectively and reusably towards methyl orange under UV light irradiation, which demonstrates the potential applications in wastewater treatment.