Preparation of Low-Oxygen Mo Ingot by Optimizing Hydrogen Reduction and Subsequent Melting from MoO₃

Abstract

In this study, we prepared low-oxygen molybdenum ingot through optimized hydrogen reduction by preparing the metal powder and repeatedly applying vacuum arc melting. We determined the optimal heat treatment conditions for hydrogen reduction and oxygen content lowering and obtained molybdenum metal powder with 3,000 ppm of oxygen. The obtained molybdenum powder was converted into an ingot with low oxygen contents (<100 ppm) through repeated vacuum arc melting. The molybdenum ingot thus prepared can be used as raw material for sputtering targets.