Development of Novel Optical Fiber System for Cathodoluminescence Detection in High Voltage Transmission Electron Microscope

抄録

We have installed a new system to observe cathodoluminescence (CL) in a high voltage transmission electron microscope (HVTEM). The system is constructed of a ball lens for collection of CL, an optical fiber and a multi-channel optical detector. The system can be operated without any disturbance of TEM observation. The system was proved to be very useful to observe CL in HVTEM and will be a powerful tool to investigate production mechanisms of luminescence centers by observing CL changes with incident electron energy and flux (displacement damage effect), and temperature, together with simultaneous TEM observations of microstructure changes.