MATERIALS TRANSACTIONS
Online ISSN : 1347-5320
Print ISSN : 1345-9678
ISSN-L : 1345-9678
Formation of Anti-Reflection Coating by Hydrothermal Treatment of Aluminum Films and Their Stabilization by Dehydration
Aki EgashiraTakuji UbeYusuke HosokiTakashi HarumotoTakashi Ishiguro
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2013 Volume 54 Issue 6 Pages 1025-1028

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Abstract

Anti-reflection coating, which exhibits higher transmittance than that of glass substrate itself, has been obtained by hydrothermal treatment of Al film in ultrapure water and hydrothermally-treated Al film was consisted of transparent boehmite (aluminum oxyhydroxide) (J. Appl. Phys. 106 (2009) 023524). However the stability of the hydrothermally-treated film is not enough, as boehmite contains water in its crystal structure. In this study, we examined the heat-treatment of such boehmite film. According to transmission electron microscopy and transmission Fourier-transform infrared spectroscopy, dehydration was observed at above 673 K for 1 h and boehmite transformed to a stable phase of γ-alumina. Though the structural change took place, the optical property of high transmittance remained and/or even improved.

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© 2013 The Japan Institute of Metals and Materials
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