Preparation of Supersaturated Fe–In Alloy Thin Films by Ion-Plating Process

抄録

In this study, Fe–In (Fe–IIIB system) alloys of ferromagnetic thin films supersaturated with indium were prepared by a triode-type ion-plating process with dual vapor sources. The preparation of the supersaturated Fe–In thin films is discussed on the basis of the effect of excess energy on the nanostructure of thin films. The kinetic energy of ions and the ionization rate in evaporation particles were measured using a Langmuir probe and a Faraday cup, respectively. The excess energy of the ion-plating process increased with increasing applied bias voltage of a discharge electrode. X-ray diffraction analysis showed that crystal structures of the supersaturated film samples were α-Fe bcc structures of an iron solid solution alloy. The ion-plating process can control the solubility limit and nanostructure of iron alloy thin films.