2016 Volume 57 Issue 7 Pages 1082-1087
Silicon (Si) spheres were prepared by a powder melting method, and their microstructures and optical properties were investigated. The lattice constant of the Si spheres increased upon phosphorus (P) diffusion, compared to that before P diffusion. This was attributed to the presence of interstitial P atoms. A fluorine-doped tin oxide (SnOx:Fy) anti-reflection film was then coated on the surface of the Si spheres. Changes in the lattice constant and bandgap of the SnOx:Fy film occurred upon subsequent annealing. This was attributed to changes in the composition of the SnOx:Fy film.