2020 Volume 61 Issue 8 Pages 1540-1543
Multiwalled carbon nanotubes (CNTs) were modified with the Hummers method and coated onto Pt electrodes patterned on SiO2/Si(001) surface to fabricate chemical sensors. The modified CNTs showed a different structure and increased number of defects compared with pristine CNTs, these properties facilitated the adsorption of NH3 gas molecules on the CNT surfaces. NH3 gas sensing results indicate that the sensor exhibited an enhanced response to gas at room temperature. The response of the modified CNT-based sensor was 10 times higher than that of pristine CNT-based sensors.