Strain Measurement of Micrometre-Sized Structures under Tensile Loading by Using Scanning White-Light Interferometry

抄録

A scanning white-light interferometry (SWLI) technique was used to image the surface topography and measure the in-plane strain in micrometre-sized structures subjected to uniaxial tensile deformation. This technique was applied to observing the macro and local deformation behaviours in micrometre-sized Au specimens. Reproducible stress–strain curves were successfully obtained using SWLI during the intermittent tensile tests. The local strain distribution was also calculated from the movement of natural gauge marks that are characteristic of triangular elements. Combining this micro-tensile test with orientation imaging microscopy enables crystal plasticity of mesoscale structures to be revealed.