抄録
Present work focuses on the structural change of Zr-Cu glassy film via penetration of different reactivity of N+ and Ar+ and its elasticity measurement. Amorphous Zr-30 at%Cu film has been synthesized by ion beam sputtering on Si substrate. Nitrogen implantation induced precipitation microstructure with (Zr-Cu) nitride and Cu phase in glassy matrix. Inert gas element of Ar+ makes voids structure inside of the film at the mean penetration depth of Ar+ as maintained glassy phase. Resultant microstructures due to penetrated ions strongly depend on their degree of chemical reactivity with constituents. Surface elasticity of modified structure have been evaluated from nano-indentation test and given the normalization treatment for measured Young’s modulus.
