抄録
Recent developments of inorganic membranes prepared by chemical vapor deposition (CVD) methods are summarized. CVD methods are classified in to two methods. One is one side geometry and the other is counter diffusion geometry. Silica source is introduced at the one side of a porous substrate for one side geometry methods, while two reactants are provided from the opposite sides of a porous substrate for counter diffusion methods. The major research area for the CVD inorganic membranes is to prepare silica membranes for hydrogen separation. In order to improve hydrothermal stability for the silica membranes, preparation methods of silica-metal oxide hybrid membranes have been investigated. Recently, pore size control methods have been reported to obtain larger pore silica membranes.
