抄録
Plasma polymerization to make organic coatings has become an important practical technique for the deposition of pinhole-free conformable thin films of superior physical, chemical, mechanical, electrical, and electronical properties. They are now providing many useful functions as dielectric layers, optical coatings, reverse osmosis and ultrafiltration membranes, antireflection coatings, and photovoltaic cells. The purpose of this paper is to briefly review basic principle and apparatus of plasma polymerization and to introduce useful applications of the products.
