Proceedings of Microelectronics Symposium
Online ISSN : 2434-396X
MES2013
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Host: Japan Institute of Electronics Packaging

MES2013
Infrared inspection system INSPECTRA-IR enables fully automated defect inspection of Si structures.
*[in Japanese]
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 331-332

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© 2013 The Japan Institute of Electronics Packaging
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