抄録
A new atomic force microscope(AFM)was developed and its performance was evaluated experimentally and theoretically. First, a self-sensing and self-actuating probe with PZT film was fabricated, which simplifies AFM structure and increases imaging speed. Next, its dynamic characteristics were clarified by forced-vibration tests and follow-up tests, and the measured response time agreed with theoretical one obtained by a transient response analysis of a 1-DOF system. Finally a sapphire surface was measured by the developed AFM and the atomic size resolution was obtained.
