抄録
This paper reports on a tunable micro optical filter for measuring spectral endoscope which can acquire spectroscopic images of a target. We use a micro Fabry-Perot Interferometer (MFPI) as the tunable optical filter. The MFPI with the Si/Si_3N_4/Si multi-layer mirrors and the MFPI prototype were designed and fabricated. This MFPI can be used in the wavelength ranging from 450 nm to 1000 nm. The RGB image of the butterfly was taken by the spectral endoscope, which consists of the MFPI prototype, a CCD, and lenses. The image according to the peak wavelength was also acquired. Thus, we demonstrate the efficiency of the MFPI for the spectral endoscope.
