抄録
A piezoelectric actuator is used as a positioning device which produces large force, high speed and high response. In practical use for a micro-positioning system, however, force support and displacement expansion mechanism is required to obtain precise output displacement. This research deals with the integrated-type linear positioning stage having displacement expansion mechanism. This stage consists of 2 piezoelectric actuators, a base stage body, two kinds of hinges, and displacement expansion mechanism. This stage is designed to be driven in the X direction, while two piezoelectric actuators are actuated synchronistically. The basic property of positioning stage and the integral controlling system are described in this report.
