Development of Functional Devices Using Three-Dimensional Micro/Nano Stereolithography

Abstract

Recently micro/nano stereolithography techniques have been widely applied to many application fields including photonics, MEMS and lab-on-a-chip. In particular, two-photon microstereolithography using a femtosecond pulsed laser has attracted much attention due to its ability to provide both 100 nm resolution and wide varieties of materials. In this paper, recent progress of two-photon microstereolithography is briefly reviewed. As one of promising applications, functional lab-on-a-chip devices driven by a laser beam are demonstrated. Three-dimensional (3-D) molding process for the production of ceramic microdevices such as microchannels, scaffolds and energy harvesters is also demonstrated. The combination of microstereolithography and ceramic molding process will open a new way to produce 3-D functional ceramic microstructures.