[Invited Paper] A High SNR Global Shutter CMOS Image Sensor Technology for High Precision Absorption Imaging Applications

Tetsu Oikawa; Rihito Kuroda; Aoi Hamaya; Yoshinobu Shiba; Takafumi Inada; Yushi Sakai; Yasuyuki Shirai; Shigetoshi Sugawa

doi:10.3169/mta.12.167

Regular Section

[Invited Paper] A High SNR Global Shutter CMOS Image Sensor Technology for High Precision Absorption Imaging Applications

Tetsu Oikawa, Rihito Kuroda, Aoi Hamaya, Yoshinobu Shiba, Takafumi Inada, Yushi Sakai, Yasuyuki Shirai, Shigetoshi Sugawa

著者情報

キーワード: Absorption imaging, CMOS image sensor, Signal to noise ratio (SNR), Global shutter, Fluid concentration distribution

ジャーナルフリー

2024 年 12 巻 2 号 p. 167-174

DOI https://doi.org/10.3169/mta.12.167

詳細

抄録

In this article, a high SNR global shutter CMOS image sensor technology for high precision imaging and analysis and its application for absorbance spectroscopy are discussed including technical requirements and future directions. Also presented is the developed high SNR voltage domain global shutter image sensor with sensitivity in wide wavelength range for absorption imaging. The fabricated chip achieved 69.7 dB maximum SNR and 1000 fps maximum SNR and successfully captured concentration distribution of NO₂ gas in semiconductor manufacturing chamber owing to its high SNR and high framerate.

責任著者(Corresponding author)

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