Abstract
Plasma polymerization to make organic coatings has become an important practical technique for the deposition of pinhole- free conformable thin films with superior physical, chemical, mechanical, electrical and electronical properties. The purpose of this paper is to briefly review basic principle and method of polymerization and to introduce the structure of plasma polymerization analyzed by various methods. Recently, plasma polymerization of metal-containing compounds has been attracted considerable attention since the metals incorporated in organic thin films can dramatically influence on the physical, chemical and electrical properties of the resulting films and the recent progress of this field will also be described.
